JPS6236067U - - Google Patents
Info
- Publication number
- JPS6236067U JPS6236067U JP12304885U JP12304885U JPS6236067U JP S6236067 U JPS6236067 U JP S6236067U JP 12304885 U JP12304885 U JP 12304885U JP 12304885 U JP12304885 U JP 12304885U JP S6236067 U JPS6236067 U JP S6236067U
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- plate
- grounding
- electrode plate
- shield member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005268 plasma chemical vapour deposition Methods 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- 238000005452 bending Methods 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12304885U JPH0455Y2 (en]) | 1985-08-09 | 1985-08-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12304885U JPH0455Y2 (en]) | 1985-08-09 | 1985-08-09 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6236067U true JPS6236067U (en]) | 1987-03-03 |
| JPH0455Y2 JPH0455Y2 (en]) | 1992-01-06 |
Family
ID=31013797
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12304885U Expired JPH0455Y2 (en]) | 1985-08-09 | 1985-08-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0455Y2 (en]) |
-
1985
- 1985-08-09 JP JP12304885U patent/JPH0455Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0455Y2 (en]) | 1992-01-06 |